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半导体生产线调度与仿真系统研究与实现
引用本文:薛陈江,乔非,李莉.半导体生产线调度与仿真系统研究与实现[J].系统仿真技术,2005,1(3):168-172.
作者姓名:薛陈江  乔非  李莉
作者单位:同济大学CIMS研究中心,上海,200092
基金项目:国家自然科学基金项目(60374005),国家973项目(2002CB312202),上海市博士后基金项目(04QMX1429)资助
摘    要:基于半导体制造企业的实际需求,在SIMUL8平台上设计并实现了半导体生产线调度与仿真系统TB-PSS。该系统主要由三个子系统构成:数据库子系统、仿真调度子系统和性能分析评价子系统。仿真调度子系统是TB-PSS系统的核心,它根据数据库提供的数据和调度规则从生产线当前状态开始仿真,仿真结果预测了生产线即将发生的事件,由性能分析评价子系统反馈给用户。目前,TB-PSS已在半导体生产线上得到了应用,能够辅助生产管理人员决策,并取得了较好的实际效果。

关 键 词:半导体生产线  SIMUL8  离散事件系统仿真  仿真优化

The Research and Implementation of a Scheduling and Simulation System for Semiconductor Production Line
XUE Chenjiang,QIAO Fei,LI Li.The Research and Implementation of a Scheduling and Simulation System for Semiconductor Production Line[J].System Simulation Technology,2005,1(3):168-172.
Authors:XUE Chenjiang  QIAO Fei  LI Li
Abstract:According to the practical demands from the semiconductor production lines, a scheduling and simulation system for semiconductor product line, TB-PSS, is designed and implemented on the platform of SIMUL8. TB-PSS is composed of three sub-systems: the database sub-system, the simulation and scheduling sub-system and the analysis of performance sub-system. The simulation and scheduling sub-system is the most important part of TB-PSS, which uses input data provided by database and policy rules to simulate from the current state of product line in time. The result is a plan that predicts what will happen in the real production line, showed to user by the analysis of performance sub-system. Now, TB-PSS has been applied in a semiconductor product line to assist the manufacture manager in making decision, and has gotten a well feedback.
Keywords:semiconductor production line  SIMUL8  discrete event simulation  optimization of simulation
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