Permanent magnet micromotors on silicon substrates |
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Authors: | Wagner B Kreutzer M Benecke W |
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Affiliation: | Fraunhofer Inst. for Silicon Technol., Berlin; |
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Abstract: | Different types of sliding, rolling, or rotating micromotors with rare-earth-based permanent magnet rotors are presented. The magnets move synchronously with rotating or traveling magnetic fields generated by 25-μm-thick gold current lines on silicon substrates. The magnets are guided in channels or openings in the silicon itself or in additional glass layers. For magnets with a typical dimension of 1 mm, forces and torques of 150 μN and 100 nNm could be achieved. Maximum velocities of 24 cm/s and a rotation frequency of 2000 r.p.m. have been measured. Magnetic clamping to the bottom confines the rotor to the system and allows a motor operation at any tilt angle. Noncontact magnetic transmission of forces to drive a ferromagnetic fluid has been demonstrated |
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