Fabrication and frequency response of dual-element ultrasonic transducer using PZT-5A thick film |
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| Affiliation: | 1. Department of Advanced Fusion Technology, Konkuk University, 1 Hwayang-dong, Gwangjin-gu, Seoul 143-701, South Korea;2. Department of Advanced Materials Science and Engineering, Mokpo National University, Muan 534-729, South Korea;3. Core Technology Lab, Samsung SDI, 575 Shin-Dong, Youngtong-Gu, Suwon, Gyeonggi-Do 442-391, South Korea;4. Technology Department, Agency for Defense Development, P.O. Box 35, Yuseong, Daejeon 305-600, South Korea;1. Dipartimento di Chimica Industriale “Toso Montanari”, Università di Bologna, Viale Risorgimento 4, 40136 Bologna, Italy;2. Interdepartmental Center for Industrial Research on Advanced Applications in Mechanical Engineering and Materials Technology, CIRI MAM, Italy;1. Ural Federal University, Laboratory of Magnetic Sensors, Ekaterinburg, Russia;2. Universidad Pais Vasco UPV-EHU, BC Materials, Bilbao, Spain;3. Instituto de Ciencia de Materiales de Madrid, Madrid, Spain |
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| Abstract: | Ultrasonic transducers based on PZT-5A thick films deposited onto polycrystalline Al2O3 substrates using screen-printing were successfully fabricated. Considering the relatively high sintering temperature of PZT-5A thick films and better impedance matching characteristics with PZT-5A, polished polycrystalline Al2O3 were used as substrates. For electrodes, high quality platinum (Pt) was deposited by a thin film process, because the surface state of electrodes greatly affects the quality of piezoelectric films. Applying Pt/PZT-5A/Pt/Al2O3 structures, dual-element ultrasonic transducers were assembled. The assembled transducers included a wear plate (normally alumina with 40.21 × 106 kg/m2 s of impedance), backing (tungsten carbide-epoxy), electrical matching, an epoxy glue layer, and a housing. The optimum measurement ranges of 5 and 10 MHz ultrasonic transducers were 2.51–300.2 and 2.50–250.1 mm, respectively. From the time and frequency response measurements of the assembled 10 MHz DEUTs, the value of ?20 dB level waveform duration and the ?6 dB bandwidth was 481.8 ns and 34.4%, respectively. Also, the measurement accuracies of both 5 and 10 MHz DEUTs assembled in this study were below 0.1 and 0.4%, respectively. |
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