| 新型抗腐蚀结构声表面波湿度传感器的研究 |
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| 引用本文： | 童筱钧,钟素娟.新型抗腐蚀结构声表面波湿度传感器的研究[J].传感器与微系统,2011,30(1):38-40. |
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| 作者姓名： | 童筱钧 钟素娟 |
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| 作者单位： | 童筱钧,TONG Xiao-jun(南京大学,声学研究所,近代声学教育部重点实验室,江苏,南京,210093;无锡秦歌电子科技有限公司,江苏,无锡,214125);钟素娟,ZHONG Su-juan(无锡秦歌电子科技有限公司,江苏,无锡,214125) |
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| 基金项目： | 江苏省基础研究计划资助项目，近代声学教育部重点实验室基金资助项目 |
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| 摘 要： | 为解决声表面波(SAW)湿度传感器存在易被污染、不易清洁、稳定性差等问题,提出了一种新的基于改进的单端口SAW谐振器结构用于湿度检测。在此结构中,在ITO材料制作的叉指换能器和反射阵上溅射厚度为5pm Si3N4层以屏蔽各种腐蚀性物质如酸性、碱性等腐蚀性气体对SAW谐振器电极的侵蚀。相比常规谐振器,新结构加大了谐振器叉指换能器与一个反射阵之间距用于涂敷湿敏材料,同时在石英基片背面布设ITO材料脱湿电路。给出了基于此类结构SAW湿度传感器的制作工艺、感湿实验测试结果。实验验证了该结构SAW湿度传感器的可清洁性、耐腐蚀性及该结构的有效性。
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| 关 键 词： | 声表面波 湿度传感器 叉指换能器 抗腐蚀结构 |
Study on novel anti-corrosion structure of surface acoustic wave humidity sensor |
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| TONG Xiao-jun,ZHONG Su-juan.Study on novel anti-corrosion structure of surface acoustic wave humidity sensor[J].Transducer and Microsystem Technology,2011,30(1):38-40. |
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| Authors: | TONG Xiao-jun ZHONG Su-juan |
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| Affiliation: | 1.Institute of Acoustics,Key Laboratory of Ministry of Education for Modern Acoustics,Nanjing University,Nanjing 210093,China;2.Wuxi Qinge Electronics Science and Technology Co.Ltd,Wuxi 214125,China) |
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| Abstract: | A novel structure of surface acoustic wave humidity sensor is prensented.A new structure is presented based on revised SAW resonator.ITO is used as electrode material,Si3N4 is used as protective layer sputtered on IDT and reflectors,and pilymide is used as sensitive material spin coated between IDT and reflector.Relationship between relative humidity and frequency shift of oscillator is given.The experiments show that the novel structure is effective for measuring humidity. |
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| Keywords: | surface acoustic wave(SAW) humidity sensor interdigital transducer(IDT) anticorrosion structure |
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