金属多环振动盘MEMS微陀螺及其微加工工艺

基于硅基振动盘微陀螺采用金属材料作为振子,提出了一种金属结构多环振动盘MEMS微陀螺,通过使用电镀工艺,实现了金属结构多环振动盘微陀螺的低成本低温加工方法.通过研究振动盘式微陀螺的工作原理及检测和驱动方法,设计了多环振动盘微陀螺的结构.使用有限元方法对陀螺金属振子进行了动力学仿真,验证了金属结构多环振动盘陀螺的可行性,并对微陀螺的加工工艺流程进行了微加工制作,获得了微陀螺芯片.研究解决了实现金属结构多环振动盘微陀螺的关键技术.

Metallic multi-ring disc resonator MEMS micro-gyroscope and its micromachining technology

Based on silicon-based disc resonator gyroscope,a kind of metallic multi-ring disc resonator gyroscope (MMDRG) is presented,which can be achieved at a lower cost and under lower temperature by using electroplating technology.Through researching on working principle,as well as detecting and driving methods of microgyro,structure of metallic multi-ring DRG is designed.The dynamic simulation is applied on the gyroscope to verify feasibility by using the finite element method.The process flow is designed to achieve the micro gyroscope chip.The research solves the key technology to realize the metallic multi-ring disc resonator gyroscope.