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基于金属有机框架化合物修饰的QCM湿度传感器
引用本文:郑倩,徐芬,孙立贤,焦成丽,张箭.基于金属有机框架化合物修饰的QCM湿度传感器[J].传感器与微系统,2013,32(3).
作者姓名:郑倩  徐芬  孙立贤  焦成丽  张箭
作者单位:1. 辽宁师范大学化学化工学院,辽宁大连,116029
2. 中国科学院大连化学物理研究所材料热化学组,辽宁大连,116023
基金项目:国家自然科学基金资助项目,辽宁省教育厅基金资助项目
摘    要:提出一种基于自行合成的钴金属框架化合物Co2(oda)2(4,4’-bipy)修饰的石英晶体微天平(QCM)的新型湿度传感器,研究了其制备条件、不同溶剂和不同修饰量对传感器性能的影响。实验结果表明:水在1.2×10-6~20×10-6范围内与频率变化量呈良好的线性关系,其相关系数为0.99903,检测灵敏度可达到87.40 Hz/10-6,检测限为0.16×10-6(信噪比为3∶1)。将此传感器在实际环境中对11%~95%RH进行了检测,结果显示频率对数变化logΔf与%RH呈良好的线性关系,其线性方程为logΔf=1.414 2+0.018 18%RH,R=0.999 65。该湿度传感器具有制备简单、体积小、选择性好、灵敏度高、稳定性好等特点,为湿度检测提供了一个新的方法。

关 键 词:湿度传感器  石英晶体微天平  钴金属有机框架化合物  4  4’—联吡啶  一缩二乙醇酸

Humidity sensor based on metal-organic framework compound modified QCM
ZHENG Qian , XU Fen , SUN Li-xian , JIAO Cheng-li , ZHANG Jian.Humidity sensor based on metal-organic framework compound modified QCM[J].Transducer and Microsystem Technology,2013,32(3).
Authors:ZHENG Qian  XU Fen  SUN Li-xian  JIAO Cheng-li  ZHANG Jian
Abstract:A novel type of humidity sensor based on Co2(oda)2(4,4'-bipy) modified quarts crystal microbalance(QCM) is presented,and effect of preparation conditions,different solvent and different modified quantity on sensor character is studied.The experimental results show that this humidity sensor has linear relation with frequency variation at range of 1.2 ×10-6 ~20×10-6 with correlation coefficient 0.999 03,sensitivity of 87.40 Hz/10-6 and detecting limit of 0.16 ×10-6(signal to noise ratio is 3∶ 1).In addition,the sensor is also test in relative humidity at range of 11 % ~95 %RH,result indicates that logarithmic change log Δf exhibits good linear relation with %RH,and the linear equation is log Δf=1.414 2+0.018 18 %RH,R=0.999 65.The humidity sensor has characters of easy to fabricate,small size,good selectivity,high sensitivity,good stability,and provide a new method for humidity detection.
Keywords:humidity sensor  QCM  cobalt metal-organic frameworks compound  4  4'-bipyridine  oxydiacetic acid
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