| 一种新型MEMS温度传感器 |
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| 引用本文： | 时子青,陈向东,龚静,李秀梅.一种新型MEMS温度传感器[J].传感器与微系统,2011,30(9). |
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| 作者姓名： | 时子青 陈向东 龚静 李秀梅 |
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| 作者单位： | 1. 西南交通大学信息科学与技术学院,四川成都,610031
2. 西南交通大学物理科学与技术学院,四川成都,610031 |
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| 基金项目： | 国家自然科学基金资助项目(60871024); 国家重点实验室开放课题(KFJJ200915) |
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| 摘 要： | 提出了一种新型的基于硅微桥的MEMS温度传感器。传感器是由表面制有惠斯通电桥的硅微桥和淀积在其表面的温敏聚合物薄膜构成。应用弹性力学薄板理论分析了该温度传感器的模型。分析表明:硅微桥的输出与温度变化呈线性关系。在温敏薄膜材料参数已知时,采用大面积、高厚度,可以改善传感器性能。
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| 关 键 词： | 双层薄膜 硅微桥压阻式 温度传感器 微机电系统 |
A novel MEMS temperature sensor |
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| SHI Zi-qing,CHEN Xiang-dong,GONG Jing,LI Xiu-mei.A novel MEMS temperature sensor[J].Transducer and Microsystem Technology,2011,30(9). |
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| Authors: | SHI Zi-qing CHEN Xiang-dong GONG Jing LI Xiu-mei |
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| Affiliation: | SHI Zi-qing1,CHEN Xiang-dong1,GONG Jing1,LI Xiu-mei2(1.School of Information Science & Technology,Southwest Jiaotong University,Chengdu 610031,China,2.School of Physical Science and Technology,China) |
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| Abstract: | A novel MEMS temperature sensor employing a bi-layer film structure is presented.The sensing unit is composed of a silicon micro-bridge embedded with a piezoresistive Wheatstone bridge and a temperature sensitive polymer film.Model analysis of the temperature sensor using elastic mechanics theory is presented.Analysis shows that the output of the silicon micro-bridge is linear with temperature.Larger area and thicker thickness can improve the performance when the polymer film material parameters are known. |
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| Keywords: | bi-layer film Si micro-bridge piezoresistive temperature sensor MEMS |
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