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静电支撑式水银加速度计研究
引用本文:马帮军,叶凌云,蔡鹏. 静电支撑式水银加速度计研究[J]. 传感器与微系统, 2015, 0(8). DOI: 10.13873/J.1000-9787(2015)08-0073-03
作者姓名:马帮军  叶凌云  蔡鹏
作者单位:浙江大学 生物医学工程与仪器科学学院,浙江 杭州,310027
摘    要:提出一种新原理的静电支撑水银加速度计,从根本上解决现有的水银加速度计量程小、测量稳定性不足等问题。采用静电支撑技术,利用电场力平衡惯性力,通过精确测量控制电压获取高精度的加速度信息。通过建模仿真,静电支撑水银加速度计的量程、线性度要高于现有的水银加速度计。这种加速度计不仅具有水银加速度计的高灵敏度、抗高过载,还具有大量程、稳定性好等优点,对高性能惯导中的加速度测量具有不可替代的作用。

关 键 词:加速度计  水银  静电支撑技术  力平衡

Research of electrostatically suspended mercury accelerometer
MA Bang-jun,YE Ling-yun,CAI Peng. Research of electrostatically suspended mercury accelerometer[J]. Transducer and Microsystem Technology, 2015, 0(8). DOI: 10.13873/J.1000-9787(2015)08-0073-03
Authors:MA Bang-jun  YE Ling-yun  CAI Peng
Abstract:To solve the problems of mercury accelerometers,a novel principle electrostatically suspended mercury accelerometer is proposed. Electrostatically suspended means electric field force balance inertia force,high precision of the acceleration information can be acquired by the accurate measurement ofthe control voltage. This accelerometer not only has the advantages of high sensitivity and anti-high-overload of mercury accelerometers,but also has large range and good stability,it will play an important role in acceleration measurement of high performance inertial navigation.
Keywords:accelerometer  mercury  electrostatically suspended technology  force balance
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