基于MEMS细胞电融合芯片的设计与实验研究

基于MEMS技术，根据细胞电融合的工作条件，设计了一种可以在低电压驱动下工作的细胞电融合芯片。该芯片的外界驱动电压（包括排队与融合电压）仅为传统细胞电融合槽的1／100—1／20，可以显著降低外界驱动部分的设计、制造成本，扩展细胞电融合技术的应用。介绍了该芯片的设计思路，分析了原试制细胞电融合芯片存在的可靠性和氧化问题，提出了有效的改进方法，优化了芯片设计方案，制定了相应的加工工艺流程。给出了采用该芯片对部分细胞进行初步排队、融合实验的结果，实验结果表明：对原有芯片进行的优化设计是有效的。

Design and experiment research of cell electro-fusion chip based on MEMS

Based on MEMS technology and the working condition of cell fusion,a electro-fusion chip,which can work on low voltage,is designed.Compared with traditional cell electro-fusion trough,the working voltage of chip is 1/100～1/20.It can predigest the design complexity of drive model and reduce the cost of production.It will extend the applications of cell electro-fusion technology.The idea of the cell electro-fusion chip is introduced,the problems of old chips are analyzed.An effective micromachining designing is developed to improve the low reliability and high oxygenation of the old chips.The chip project is optimized.The fabrication process of cell electro-fusion is described.The experiment results of cell alignment and fusion are shown.It testifies the optimize designing is effective.