微机械双框架陀螺仪的机理研究

微机械双框架陀螺仪是一种用于测量运动物体角速度的微型惯性器件。由于其尺寸的大幅度减少,使它在许多领域都有极其广泛的应用,是当今微米/纳米技术发展的一个主要方向。介绍了该陀螺仪的结构组成与工作机理,建立其力学模型,并在此基础上,主要对原理误差进行了定性的分析,得出了影响其精度的主要干扰源,为误差的补偿指明了方向。

Research of Micromechanical Double Gimbals Gyroscopes

The micromechanical double gimbals gyroscope is a miniature inertial instrument applied to measure the angular rate of the moving objects. Owing to its minimum size and weight,the micromechanical gyroscope will play an important role in many areas,and is the direction of the micro-nanometer technology development. Its structural components and its principle of operation are described. On the basis of the mechanical model, the principal errors are analyzed and some fatal factors influenced on the micromechanical gyroscope are discovered.