| 新型光学加速度传感器动力学性能设计 |
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| 引用本文： | 孔维军,贾书海,杨佳,王军.新型光学加速度传感器动力学性能设计[J].传感器与微系统,2007,26(9):95-97,100. |
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| 作者姓名： | 孔维军 贾书海 杨佳 王军 |
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| 作者单位： | 西安交通大学,理学院,光信息科学与技术系,陕西,西安,710049 |
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| 基金项目： | 国家自然科学基金
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教育部跨世纪优秀人才培养计划
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陕西省科技攻关项目 |
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| 摘 要： | 针对一种新型光学加速度传感器设计了一种简单实用的微弹性机械结构,它是通过MEMS工艺在硅片上加工出来。通过能量法和有限元模拟法(ANSYS 8.0)对弹性臂的弹性系数和动力学振动系统的一阶固有频率进行了分析与模拟,根据传感器的性能要求选取了微弹性机械结构的参数,并对传感器的性能进行了分析模拟。结果表明:设计是合理可行的,根据参数确定传感器的量程约为±395 m/s2,测量频率约为1~4.5 kHz。
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| 关 键 词： | 光学加速度传感器 动力学系统 微机电系统 有限元方法 |
| 文章编号： | 1000-9787（2007）09-0095-03 |
| 修稿时间： | 2007-01-08 |
Dynamic performance design of novel optical acceleration sensor |
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| KONG Wei-jun,JIA Shu-hai,YANG Jia,WANG Jun.Dynamic performance design of novel optical acceleration sensor[J].Transducer and Microsystem Technology,2007,26(9):95-97,100. |
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| Authors: | KONG Wei-jun JIA Shu-hai YANG Jia WANG Jun |
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| Abstract: | Aimed at a novel optical acceleration sensor a simple and useful micro spring-mechanical structure is designed.The structure is fabricated in a silicon substrate by MEMS technology.The elastic coefficient of the spring-arm and first-order natural frequency of the vibration system are analyzed by using energy method and simulated through the numerical simulator(ANSYS 8.0)of finite element method.In order to meet the performance requirement of the sensor,the parameters of micro spring-mechanical structure are calculated.The results indicate that the design is logical and feasible.The measuring range of the sensor determined by the calculated parameters is about ±395 m/s2 and the range of frequency is about 1~4.5 kHz. |
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| Keywords: | optical acceleration sensor dynamic system MEMS finite element method |
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