| SnO_2/SiO_2双层薄膜的湿敏特性 |
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| 引用本文： | 贾维国,季秉厚.SnO_2/SiO_2双层薄膜的湿敏特性[J].传感器与微系统,1998,17(4):22-23,26. |
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| 作者姓名： | 贾维国 季秉厚 |
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| 作者单位： | 内蒙古大学物理系 |
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| 摘 要： | 本实验是在单晶硅片上热生长一层ＳｉＯ２，然后用真空淀积的方法获得一层超微粒ＳｎＯ２薄膜，通过对ＳｎＯ２／ＳｉＯ２薄膜电阻与相对湿度关系的测试，发现阻湿的线性特性和灵敏度明显优于ＳｎＯ２薄膜和ＳｉＯ２薄膜，测湿范围明显展宽。
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| 关 键 词： | 二氧化锡 二氧化硅 薄膜 湿敏 |
Humidity Sensitivity on SnO 2/SiO 2 Double Film |
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| Jia Weiguo,Ji Binghou,Zhao Xianwu.Humidity Sensitivity on SnO 2/SiO 2 Double Film[J].Transducer and Microsystem Technology,1998,17(4):22-23,26. |
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| Authors: | Jia Weiguo Ji Binghou Zhao Xianwu |
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| Abstract: | In the experiment, first of all a piece of SiO 2 film is formed on the monocrystallined silicon by beating. Then another film-ultrafineness particle SnO 2 is deposited on the SiO 2 film by the means of Vacuum-reaction evaporation. The linear resistance against humidity characteristics and sensing characteristics to humidity of SnO 2/SiO 2 film is obviously observed to be better than that of each single film by determining the relation between the resistance of snO 2/SiO 2 film and relative humidity. The humidity measuring range is also widened. |
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| Keywords: | SnO 2 SiO 2 Film Humidity sensitivity |
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