| 微加速度传感器硅微结构设计 |
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| 引用本文： | 金磊,高世桥,李文杰.微加速度传感器硅微结构设计[J].传感器与微系统,2000,19(2):23-25. |
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| 作者姓名： | 金磊 高世桥 李文杰 |
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| 作者单位： | 北京理工大学,机电工程系,北京,100081 |
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| 摘 要： | :围绕加速度信息 ,探讨微机电加速度传感器的设计和分析 ,提出了微机电传感系统硅微结构设计的原则 ,并根据典型的弹性质量系统 ,建立了其过载变形的模型 ,给出了用于计算位移加速度关系系数的方法。
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| 关 键 词： | 微机电系统 微加速度传感器 硅微结构 动力分析 |
Design of silicon microstructure for micro electro-mechanism sensor system |
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| JIN Lei,GAO Shi-qiao,LI Wen-jie.Design of silicon microstructure for micro electro-mechanism sensor system[J].Transducer and Microsystem Technology,2000,19(2):23-25. |
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| Authors: | JIN Lei GAO Shi-qiao LI Wen-jie |
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| Abstract: | Designing and analyzing of micro electro-mechanism accelerometer is discussed surrounding accelera tion information at first,the designing principles of silicon microstructure of micro electro- mechanism sensor system are presented secondly, at last deflection model of the mass over loaded in allusion to typical system of elasticity quality is constracted,and a method used to compute relationship coefficient between displacement and acceleration is given out. |
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| Keywords: | MEMS microaccelerometer silicon microstructure dynamic analysis |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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