| 基于六维微位移传感器的并联微操作台全闭环控制 |
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| 引用本文： | 许辉焱,赵现朝,高峰,张建政.基于六维微位移传感器的并联微操作台全闭环控制[J].传感器与微系统,2009,28(4):117-120. |
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| 作者姓名： | 许辉焱 赵现朝 高峰 张建政 |
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| 作者单位： | 上海交通大学机械与动力工程学院,上海,200240 |
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| 基金项目： | 国家自然科学基金，国家重点基础研究发展规划(973计划) |
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| 摘 要： | 以一种新型的6-PSS并联微操作台为对象，将六维微位移传感器应用于微操作台的终端运动平台，设计了一种全闭环的控制系统。介绍了系统各部分的结构组成和工作原理，包括6-PSS微操作台结构及其运动学分析、六维微位移传感器组成与原理。由开闭环下的实验结论比较得知，通过基于六维微位移传感器的全闭环控制，系统定位精度得到提高，实现了终端运动平台六维位姿的精确控制。
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| 关 键 词： | 6-PSS微操作台 六维微位移传感器 全闭环控制系统 |
Full-closed loop control of parallel micro-manipulation platform based on 6-axis micro-displacement sensor |
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| XU Hui-yan,ZHAO Xian-chao,GAO Feng,ZHANG Jian-zheng.Full-closed loop control of parallel micro-manipulation platform based on 6-axis micro-displacement sensor[J].Transducer and Microsystem Technology,2009,28(4):117-120. |
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| Authors: | XU Hui-yan ZHAO Xian-chao GAO Feng ZHANG Jian-zheng |
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| Affiliation: | ( School of Mechanical Engineering, Shanghai Jiaotong University, Shanghai 200240, China) |
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| Abstract: | A full-closed loop control system is designed, which takes a new 6-PSS parallel micro-manipulation platform as object, and it is based on 6-axis micro-displacement sensor which is applied to terminal motion platform. The structure feature and working principle of both the 6-PSS micro-manipulation platform and the 6-axis micro-displacement sensor are described. By comparison of the experiment results in open loop and close loop, the conclusion is obtained that the precision of the system positioning is improved in the full-closed loop which is based on the 6-axis micro-displacement sensor. Thus the precise 6-axis pose control of the micro-manipulation platform can be realized. |
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| Keywords: | 6-PSS micro-manipulation platform f-axis micro-displacement sensor full-closed loop control system |
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