Maximization of eigenvalues using topology optimization

Topology optimization is used to optimize the eigenvalues of plates. The results are intended especially for MicroElectroMechanical Systems (MEMS) but can be seen as more general. The problem is not formulated as a case of reinforcement of an existing structure, so there is a problem related to localized modes in low density areas. The topology optimization problem is formulated using the SIMP method. Special attention is paid to a numerical method for removing localized eigenmodes in low density areas. The method is applied to numerical examples of maximizing the first eigenfrequency. One example is a practical MEMS application; a probe used in an Atomic Force Microscope (AFM). For the AFM probe the optimization is complicated by a constraint on the stiffness and constraints on higher order eigenvalues. Received June 10, 1999