An analytical study of the effect of a support geometry on frequency shift and support loss of piezoelectric ring-shaped resonators for healthcare and environmental applications |
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| Authors: | Dong F Wang Takahisa Sagawa Jian Lu Ryutaro Maeda |
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| Affiliation: | 1. Micro Engineering and Micro Systems Laboratory (i-MEMS-Lab), Department of Mechanical Engineering, Faculty of Engineering, Ibaraki University, Hitachi, Ibaraki, 316-8511, Japan
2. Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, 305-8564, Japan
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| Abstract: | Ring-shaped resonators with one support have been designed in this work. The ring-shaped resonator reacts with a mass perturbation to provide eigenstate or frequency shifts which could transfer to electrical signals by piezoelectric effect. The aforementioned ring-shaped resonator is mainly comprised with a multilayer of Pt/Ti/PZT/Pt/Ti/SiO2 deposited on the silicon-on-insulator wafer and expected to be a contour mode. In order to estimate the sensitivity of the ring-shaped resonator against the mass perturbation, the theoretical analysis was conducted by ANSYS from two aspects including: (a) the effect of support geometry on frequency shift and support loss (from view point of vibration mode shape); and (b) the mass application methodology. It is found that low-amplitude vibration area is smaller at narrow support, and frequency shift of trapezoid support is higher than that of rectangle support. |
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