Modeling and characterization of a micromachined artificial hair cell vector hydrophone |
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Authors: | Binzhen Zhang Hui Qiao Shang Chen Jun Liu Wendong Zhang Jijun Xiong Chenyang Xue Guojun Zhang |
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Affiliation: | (1) Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education. Department of Electronic Science and Technology, North University of China, Taiyuan, Shanxi, 030051, China;(2) National Key Laboratory for Electronic Measurement Technology, North University of China, Shanxi, China;(3) Department of Mechanical Engineering, University of California-Berkeley, Berkeley, CA 94720, USA |
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Abstract: | In the paper, a micromachined artificial vector hydrophone arises from a biological inspiration, the fish hair cell is presented.
It is desirable that the application of piezoresistive effects combined with ingenious bionic structure and MEMS technology
may improve the low-frequency sensitivity of the vector hydrophone as well as its miniaturization. Modeling processes for
realizing the artificial hair cell hydrophone, along with preliminary characterization results in terms of sensitivity, frequency
response and directivity patterns are also introduced. The microstructure of the sensor consists of four vertical cantilever
beams with attached rigid plastic cylinder in the center of the structure. By locating eight piezoresistors logically formed
the Wheatstone bridges; they can detect two components of underwater acoustic signal simultaneously. The prepared vector hydrophone
has been measured in the standing wave field finally. The experiment results show that the vector hydrophone has good low-frequency
characteristic, the free-field voltage sensitivity is −197.2 dB (0 dB = 1 V/μPa) at 400 Hz with a about 2 dB one-third octave
positive slope over the 40–400 Hz bandwidth. The depth of pits of the directivity pattern is about 34.6 dB. |
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