Design of high stroke electrostatic micropumps: a charge control approach with ring electrodes |
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Authors: | Emanuele Bertarelli Alberto Corigliano Andreas Greiner Jan G Korvink |
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Affiliation: | (1) Department of Structural Engineering, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milan, Italy;(2) Laboratory for Simulation, Department of Microsystems Engineering, University of Freiburg, Georges-Koehler-Allee 103, 79110 Freiburg, Germany;(3) School of Soft Matter Research, Freiburg Institute of Advanced Studies, University of Freiburg, Albertstrasse 19, 79104 Freiburg, Germany |
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Abstract: | A novel design strategy to avoid pull-in occurrence in electrostatic micro electro mechanical systems is proposed. It combines
charge control with ring electrodes, on a circular geometry. This idea is introduced here for the design of efficient and
reliable high stroke electrostatic diaphragm micropumps, while it has a broad potential applicability. A minimal lumped one
degree-of-freedom model is derived and used to introduce and demonstrate the proposed approach for a circular plate geometry.
Finite element models are subsequently adopted for a more detailed device modelling. As expected, charge control exhibits
a stabilizing effect with respect to voltage drive, but not sufficient to achieve a full-range stability for the considered
geometry. When the electrode area is properly defined, stability range can be extended up to gap closure in the central part
of the membrane. In this configuration, the increase in voltage required for full-range device drive would be relevant, while
in charge control the penalty is considerably lower. Finally, loading conditions and geometrical parameters for an optimized
actuation are suggested. |
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