Feasibility of a flip-chip approach to integrate an IR filter and an IR detector in a future gas detection cell

In this work we have studied the feasibility of integrating an infrared filter and an infrared detector by means of a flip-chip technique. This filter and detector combination should be the heart of a future gas detection cell based on infrared absorption. In our case the filter is a surface micromachined Fabry-Perot interferometer, and the infrared detector is a bulk micromachined thermopile. The flip-chip technique is an elegant solution to assure the optical micro-alignment of both devices and allows the electrical contact needed to actuate active optical filters.Work originally presented at DTIP 2003. Spanish CICYT projects no TIC-98-0987-C03-03 and DPI-2001-3213-C02-01 have financed this work.