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二氧化锡传感器对挥发性有机物的动态测试方法研究
引用本文:孟凡利,季瀚洋,苑振宇,张华,王稼鹏.二氧化锡传感器对挥发性有机物的动态测试方法研究[J].自动化学报,2022,48(3):926-934.
作者姓名:孟凡利  季瀚洋  苑振宇  张华  王稼鹏
作者单位:1.东北大学信息科学与工程学院 沈阳 110819
基金项目:国家自然科学基金(61833006,61673367,61973058);;教育部中央高校基本科研业务费项目(N180408018,N2004028);;辽宁省自然科学基金(20180550483)资助~~;
摘    要:温度调制的动态测试是解决金属氧化物传感器选择性差的一种常用方法, 但至今尚未有明确的方法控制动态响应信号的波形以达到预期期望. 本文首先从静态测试的角度出发, 描述了静态性能指标与动态响应信号的对应关系, 提出了适合于动态测试的半导体传感器的选择方法. 然后以矩形波为例, 通过对其周期、占空比、工作温度范围的调整, 在不降低动态响应信号品质的前提下, 缩短在实际应用中的响应时间和功耗. 最后, 利用支持向量机算法验证了动态响应信号的品质, 在不同种类不同浓度的气体中, 识别率高达100%.

关 键 词:半导体气体传感器    静态性能指标    动态响应信号    响应时间    功耗
收稿时间:2019-07-31

Study on Dynamic Testing Method of Volatile Organic Compounds by Tin Dioxide Sensor
Affiliation:1.School of Information Science and Engineering, Northeastern University, Shenyang 110819
Abstract:Dynamic testing of temperature modulation is a common method to improve the selectivity of metal oxide sensors, but so far there is no clear way to control the waveform of dynamic response signal to reach the expected expectation. This paper first describes the corresponding relationship between static performance index and dynamic response signal from the perspective of static testing, and proposes the selection method of semiconductor sensor suitable for dynamic testing. Then, taking rectangular wave as an example, the response time and power consumption in practical applications are shortened by adjusting its period, duty cycle and operating temperature range without reducing the quality of dynamic response signal. Finally, support vector machine algorithm is used to verify the quality of dynamic response signal. In different kinds of gases with different concentrations, the recognition rate can reach 100%.
Keywords:
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