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A windowless VUV excilamp
Authors:M I Lomaev  V S Skakun  V F Tarasenko  D V Shitts  A A Lisenko
Affiliation:(1) Institute of High-Current Electronics, Siberian Division, Russian Academy of Sciences, Tomsk, Russia
Abstract:An open windowless excilamp capable of operating on argon (λ ~ 126 nm), krypton (~146 nm), and xenon (~172 nm) dimers is described. The lamp has a total radiating surface area of 23 × 23 = 529 cm2. At a total power of ~0.8 W radiated through this area, the average output power density at λ ~ 126 nm is ~1.6 mW/cm2 at a distance of 2 cm from the emitting surface. A pulsed discharge between insulator-coated anode and thin wire cathode ensures a high efficiency of the proposed radiation source operating in the vacuum ultraviolet spectral range.
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