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| X射线衍射技术在薄膜残余应力测量中的应用 | |
| 引用本文： | 杨帆,蒋维栋,蒋建清.X射线衍射技术在薄膜残余应力测量中的应用[J].功能材料,2007,38(11):1745-1749. |
| 作者姓名： | 杨帆 蒋维栋 蒋建清 |
| 作者单位： | 1. 东南大学,材料科学与工程学院,江苏,南京,211189;哈尔滨工业大学,材料科学与工程学院,黑龙江,哈尔滨,150001 2. 哈尔滨工业大学,材料科学与工程学院,黑龙江,哈尔滨,150001 3. 东南大学,材料科学与工程学院,江苏,南京,211189 |
| 摘 要： | 残余应力测量在薄膜材料研究中具有重要的意义,综述了薄膜残余应力X射线衍射技术测量的研究现状,其中介绍了强织构薄膜残余应力X射线衍射测量技术;同时对由于G(o)bel平行光镜、毛细管元件及二维探测器等X射线功能附件的发展,以及同步辐射源X射线的应用而带来残余应力分析的新进展进行了介绍. |
| 关 键 词： | 残余应力 平行光镜 毛细管 同步辐射源X射线 二维探测器 |
| 文章编号： | 1001-9731（2007）11-1745-05 |
| 修稿时间： | 2007-04-13 |
Applications of X-ray diffraction technique in the residual stress measurement of films |
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| YANG Fan,FEI Wei-dong,JIANG Jian-qing.Applications of X-ray diffraction technique in the residual stress measurement of films[J].Journal of Functional Materials,2007,38(11):1745-1749. | |
| Authors: | YANG Fan FEI Wei-dong JIANG Jian-qing |
| Affiliation: | 1. School of Materials Science and Engineering, Southeast University, Nanjing 211189, China; 2. School of Materials Science and Engineering, Harbin Institute of Technology, Harbin 150001 ,China |
| Abstract: | The article reviewed the present progress and update accomplishments of X-ray diffraction techniques in the residual stress measurement of films, and the significant role of residual stress measurement in the study of the film science was also discussed. In addition, up-to-date research and newly published work on the residual stress measurement of the highly-textured and thin films, on a basis of the advent of the high energy synchro- tron X-ray diffraction, as well as of the improving attachments such as, G6bel parallel mirror, capillary and 2D detector, etc, were briefly introduced. |
| Keywords: | residual stress parallel mirror capillary synchrotron X-ray two dimensional detector |
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