紫外激光对触摸屏产品中不可视区域刻蚀实验研究

采用紫外激光对触摸屏产品中不可视区域进行刻蚀分析,探究了紫外激光刻蚀原理,讨论了银浆薄膜激光刻蚀与传统印刷工艺异同点,并在此基础上完成一套紫外激光刻蚀系统方案的设计和建造。实验结果表明,选用波长为355nm的紫外激光器,当激光器功率为10W,重复频率100kHz,刻蚀速度为1500mm/s,刻蚀次数1次时,薄膜被完全刻蚀,最终获得功能良好的银浆线路。经测试后发现,所刻蚀后银浆线条平直而光滑,边缘热影响区域较小,最小刻蚀线宽可以达到10μm,基板未受到损伤;与传统印刷工艺相比较,简化了工艺步骤,产品良品率得到提升,是一种无排放的绿色环保先进的刻蚀工艺。

Investigation of ultraviolet laser etching of Ag film on touch screen

An investigation was conducted on ultraviolet laser beam etching of Ag film in the covered area of a touch screen.Advantages of Laser etching process were discussed by comparison with traditional printing process.Based on the described principle of laser etching,a UV laser system was designed and built for the purpose of the investigation,on which many experiments were performed.The results show that the 355nm UV laser can efficiently etching out Ag films with one pass and with scanning speed of 1500 mm/s when laser power was 10W.A fully functional silver line pattern with a minimum line width of 10μm was successfully obtained;the etched lines were straight with clean edge;there was a negligible heat-affected area and no damage of the substrate was observable.The investigation demonstrated that the UV laser beam etching of the silver film on the touch screen product can increase yield,raise quality and be environmental friendly.