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| 单晶PMnN-PZT铁电薄膜制备与表征 | |
| 引用本文： | 张涛,马宏伟,张淑仪,李敏,赵省贵.单晶PMnN-PZT铁电薄膜制备与表征[J].功能材料,2012,43(11):1431-1433. |
| 作者姓名： | 张涛 马宏伟 张淑仪 李敏 赵省贵 |
| 作者单位： | 1. 西安科技大学理学院,陕西西安710054／南京大学声学研究所,江苏南京210093 2. 西安科技大学理学院,陕西西安,710054 3. 南京大学声学研究所,江苏南京,210093 |
| 基金项目： | 国家自然科学基金资助项目，教育部博士点基金资助项目，中国博士后基金面上资助项目，陕西省自然科学基金青年人才项目资助项目，陕西省教育厅产业化专项基金资助项目，西安市科技局工业攻关计划资助项目(CXY1125 |
| 摘 要： | 利用磁控溅射方法,在MgO基底上沉积三元系铁电薄膜6%PMnN-94%PZT(6%Pb(Mn1/3,Nb2/3)O3-94%Pb(Zr0.45,Ti0.55)O3),采用淬火方法对薄膜进行后期热处理。分别运用面内和面外X射线衍射(XRD)技术分析薄膜长相及晶体结构,运用高分辨率扫描电镜(SEM)观察薄膜的晶粒表面及截面结构。实验结果表明,所沉积薄膜为单晶钙钛矿结构薄膜,薄膜结构优良。 |
| 关 键 词： | PMnN-PZT 单晶铁电薄膜 磁控溅射 |
Fabrication and characterization of single crystal PMnN-PZT ferroelectric thin film |
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| ZHANG Tao,MA Hong-wei,ZHANG Shu-yi,LI Min,ZHAO Sheng-gui.Fabrication and characterization of single crystal PMnN-PZT ferroelectric thin film[J].Journal of Functional Materials,2012,43(11):1431-1433. | |
| Authors: | ZHANG Tao MA Hong-wei ZHANG Shu-yi LI Min ZHAO Sheng-gui |
| Affiliation: | 1(1.College of Science,Xi’an University of Science and Technology,Xi’an 710054,China; 2.Institute of Acoustics,Nanjing University,Nanjing 210093,China) |
| Abstract: | The ternary compound ferroelectric thin films,6% Pb(Mn1/3,Nb2/3)O3-94%Pb(Zr0.45,Ti0.55)O3(PMnN-PZT),were deposited on the MgO substrates by the magnetron sputtering method,and the quench method was adopted for the post heat treatment.The out-plane and in-plane X-ray diffractions were used to characterize the crystal structure of the PMnN-PZT thin films,and the highly accurate scan electron microscope is used to observe the surface and the cross section surface of the thin films.It can be obtained that the PMnN-PZT thin films own single crystal structure and perovskite phase. |
| Keywords: | PMnN-PZT single crystal ferroelectric thin film magnetron sputtering |
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