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用射频磁控溅射法制备的Zn1-xMgxO薄膜光致发光特性
引用本文:许小亮,王燎原,王烨,杨智超,施朝淑.用射频磁控溅射法制备的Zn1-xMgxO薄膜光致发光特性[J].功能材料,2006,37(2):319-321.
作者姓名:许小亮  王燎原  王烨  杨智超  施朝淑
作者单位:1. 中国科学院中国科学技术大学,结构分析实验室,安徽,合肥,230026;中国科学技术大学,物理系,安徽,合肥,230026
2. 中国科学院中国科学技术大学,结构分析实验室,安徽,合肥,230026
基金项目:The project is supported by National Natural Science Foundation (50472008); Anhui Scientist Foundation (2003Z021,04022001 ).
摘    要:用射频磁控溅射法在Si(100)衬底上生长了一组Zn1-xMgxO(x=0~0.16)薄膜.并在不同温度下退火.对薄膜的光致发光研究表明,在薄膜的发射谱的紫外区域有分别对应自由激子(以及相应的声子伴线)和电子-空穴等离子体的发光机制,其中后者有5倍超线性的受激发射,其受激发射阈值与薄膜的退火温度相关,样品中最低受激阈值为40kW/cm2.

关 键 词:ZnMgO  光致发光  受激发射阈值  ZnMgO  photoluminescence  lasing  threshold
文章编号:1001-9731(2006)02-0319-03
收稿时间:2005-03-29
修稿时间:2005-12-06

Photoluminescence property of Zn1-xMgxO films grown by RF magnetron sputtering
XU Xiao-liang,WANg Liao-yuan,WANG Ye,YANG Zhi-chao,SHI Chao-shu.Photoluminescence property of Zn1-xMgxO films grown by RF magnetron sputtering[J].Journal of Functional Materials,2006,37(2):319-321.
Authors:XU Xiao-liang  WANg Liao-yuan  WANG Ye  YANG Zhi-chao  SHI Chao-shu
Affiliation:1. Structure Research Laboratory, University of Science and Technology of China, Chinese Academy of Sciences, Hefei 230026 ,China; 2. Department of Physics, University of Science and Technology of China, Hefei 230026, China
Abstract:A series Zn1-xMgxO (x=0~0.16) films grown on Si(100) substrate were prepared by RF magnetron sputtering and annealed at different temperature. The UV emission peaks of free exciton (and assisted phonon replicas) and electron-hole plasma (E-H) were found in the photoluminescence (PL) from the Zn1-xMgxO films, where the E-H has a five-time super-linear enhanced lasing effect. The blue shift of the UV peaks in the photoluminescence spectra is found to be associated with increasing Mg content in Zn1-x Mgx O films, and the peaks intensity is also reinforced significantly as increasing the annealing temperature.The minimum lasing threshold of the samples is 40kW/cm2.
Keywords:ZnMgO  photoluminescence  lasing threshold
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