| 氧化铝基体表面预处理对金刚石薄膜生长的影响 |
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| 引用本文： | 孟祥钦,王兵,王玉乾,甘孔银,李凯,王延平,何婷.氧化铝基体表面预处理对金刚石薄膜生长的影响[J].功能材料,2009,40(10). |
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| 作者姓名： | 孟祥钦 王兵 王玉乾 甘孔银 李凯 王延平 何婷 |
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| 作者单位： | 1. 西南科技大学,材料学院,四川,绵阳,621010
2. 中物院应用电子学研究所,四川,绵阳,621900 |
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| 基金项目： | 国家自然科学基金资助项目(10876032); 国家高技术研究发展计划(863计划)基金资助项目(20070202); 四川省教育厅青年基金资助项目(2006B048) |
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| 摘 要： | 采用微波等离子体化学气相沉积方法,在经不同预处理的氧化铝衬底上沉积金刚石薄膜.用X射线衍射仪、激光拉曼光谱仪、扫描电镜(SEM)对所得薄膜的成分、物相纯度和表面形貌进行表征,比较不同的预处理方式对金刚石薄膜生长的影响.结果表明,基体表面经过熔融碱腐蚀后形成薄膜的膜基结合良好且膜材质量最佳,但表面平整度较低;而基体只经金刚石微粉乙醇悬浊液超声处理则在沉积时金刚石容易成膜,且结构要更为致密;在经过酸腐蚀的基体上沉积金刚石薄膜时,容易在薄膜与基体之间先形成过渡层,而后才进行金刚石薄膜的沉积.所得结果表明熔融碱腐蚀处理是获得电学应用氧化铝基金刚石薄膜复合材料的最适宜的基体表面预处理.
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| 关 键 词： | 氧化铝 表面预处理 金刚石薄膜 MPCVD |
The influence of surface pretreatment on diamond film growing on Al_2O_3 substrate |
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| MENG Xiang-qin,WANG Bing,WANG Yu-qian,GAN Kong-yin,LI Kai,WANG Yan-ping,HE Ting.The influence of surface pretreatment on diamond film growing on Al_2O_3 substrate[J].Journal of Functional Materials,2009,40(10). |
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| Authors: | MENG Xiang-qin WANG Bing WANG Yu-qian GAN Kong-yin LI Kai WANG Yan-ping HE Ting |
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| Affiliation: | MENG Xiang-qin1,WANG Bing1,WANG Yu-qian1,GAN Kong-yin2,LI Kai2,WANG Yan-ping1,HE Ting1(1.School of Materials Science and Engineering,Southwest University of Science and Technology,Mianyang 621010,China,2.Institute of Applied Electrinics,CAEP Mianyang 621900,China) |
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| Abstract: | Diamond films were deposited on Al_2O_3 substrates which were pretreated differently by microwave plasma chemical vapor technology.Then XRD,Raman spectroscopy and scanning electron microscopy(SEM) were utilized to characterize the composition,phase purity and surface morphology of obtained films.The results showed diamond films deposited on the Al_2O_3 can be obviously influenced by substrate pretreatment,in which the quality and adhesion of diamond films on the etched in KOH melting solution prohibit best,... |
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| Keywords: | Al_2O_3 surface pretreatment diamond films MPCVD |
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