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基于WO3和NiOx的单基片全无机智能窗器件的快速制备及其性能的研究
引用本文:王怀义,刁训刚,王武育,郝维昌,王聪,王天民.基于WO3和NiOx的单基片全无机智能窗器件的快速制备及其性能的研究[J].功能材料,2009,40(8).
作者姓名:王怀义  刁训刚  王武育  郝维昌  王聪  王天民
作者单位:1. 北京航空航天大学,理学院,凝聚态与材料物理研究中心,北京,100083;北京印刷学院,基础部,北京,102600
2. 北京航空航天大学,理学院,凝聚态与材料物理研究中心,北京,100083
3. 北京有色金属研究总院,北京,100088
基金项目:国家重点基础研究发展计划(973计划)资助项目(2007CB936300)
摘    要:介绍了利用磁控溅射和一种液氮冷却装置,制备非晶态WO3薄膜、非晶态LiNbO3薄膜和纳米微晶态NiOx薄膜的有效方法.进而,使用这种液氮冷却装置,采用全程基片冷却方法,制备了单基片无机全固态智能窗--G│ITO│NiOx│LiNbO3│WO3│ITO器件.实验结果表明,在400~800nm的可见光范围内,该器件经过1000次循环后,它的漂白态透射率为63.0%,而着色态透射率为10.6%,这一初步工作表明,基片冷却方法应该是制备有优异性能的无机全固态电致变色智能窗的有效方法.

关 键 词:磁控溅射  无机全固态  电致变色  智能窗

Fast fabrication of single-substrate inorganic all-solid state smart window device based on WO_3 and NiOx and sdudy on its performance
WANG Huai-yi , DIAO Xun-gang , WANG Wu-yu , HAO Wei-chang , WANG Cong , WANG Tian-min.Fast fabrication of single-substrate inorganic all-solid state smart window device based on WO_3 and NiOx and sdudy on its performance[J].Journal of Functional Materials,2009,40(8).
Authors:WANG Huai-yi  DIAO Xun-gang  WANG Wu-yu  HAO Wei-chang  WANG Cong  WANG Tian-min
Affiliation:WANG Huai-yi1,2,DIAO Xun-gang1,WANG Wu-yu3,HAO Wei-chang1,WANG Cong1,WANG Tian-min1(1.Center for Condensed Matter and Materials Physics,School of Science,Beihang University,Beijing 100083,China,2.Beijing Institute of Graphic Communication,Science Education Department,Beijing 102600,3.General Research Institute for Non-ferrous Metals,Beijing 100088,China)
Abstract:In this paper we introduce a effective method to prepare amorphous-porous WO3,amorphous LiNbO3,and nano-microcrystalline NiOx films by magnetron sputtering and a cooling apparatus based on liquid nitrogen.Therefore,using the cooling apparatus,We have fabricated single-substrate inorganic all-solid state smart window device consisting of G/ITO/NiOx/LiNbO3/WO3/ITO.The experimental results show that in the visible range between 400 and 800nm,transmittance average of its bleached state after 1000th cycle is 63....
Keywords:magnetron sputtering  inorganic all-solid state  electrochromism  smart window  
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