| Ba1—xSrxTiO3薄膜的制备及特性研究 |
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| 引用本文： | 王培英,王欣宇.Ba1—xSrxTiO3薄膜的制备及特性研究[J].功能材料,1998,29(5):536-538. |
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| 作者姓名： | 王培英 王欣宇 |
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| 作者单位： | 华中理工大学固体电子学系!武汉，430074，华中理工大学固体电子学系!武汉，430074，华中理工大学固体电子学系!武汉，430074，华中理工大学固体电子学系!武汉，430074，华中理工大学固体电子学系!武汉，430074 |
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| 摘 要： | 用溶胶－凝胶方法制备Ｂａ１－ｘＳｒｘＴｉＯ３（ＢＳＴ）薄膜材料，研究薄的结构和电性能。用ＸＤＲ及ＳＥＭ分析了沉积在硅片上的ＢＳＴ薄膜的结构，测试了在室温下ＢＳＴ薄膜的电滞回线及介电特性。
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| 关 键 词： | 溶胶－凝胶 BST薄膜 介电特性 铁电体 |
Investigation on Characters and Preparation of Ba_(1-x)Sr_x TiO_3 Thin Films |
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| Wang Peiying, Wang Xinyu, Liu Meidong, Rao Yunhua, Zeng Yike.Investigation on Characters and Preparation of Ba_(1-x)Sr_x TiO_3 Thin Films[J].Journal of Functional Materials,1998,29(5):536-538. |
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| Authors: | Wang Peiying Wang Xinyu Liu Meidong Rao Yunhua Zeng Yike |
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| Abstract: | Ba1-xSrx Tio3 (BST) thin films were prepared by Sol-gel method. The structure and electric properties of BST thin films were studied. The crystallographic structure of BST films deposited on Si substracts was examined by the XRD and SEM method. Ferroelectric hysteresis curves and dielectric properties of BST thin films could be measured at room temperature. |
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| Keywords: | Sol-gel BST thin film dielectric property |
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