| 蒸发速率对ITO光学常数的影响 |
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| 引用本文： | 李天璘,朱彦旭,徐晨,高国,沈光地.蒸发速率对ITO光学常数的影响[J].功能材料,2009,40(1). |
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| 作者姓名： | 李天璘 朱彦旭 徐晨 高国 沈光地 |
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| 作者单位： | 北京工业大学,电控学院光电子技术实验室,北京,100124
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| 基金项目： | 国家高技术研究发展计划(863计划)，北京市人才强教计划基金，北京工业大学博士科研启动基金 |
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| 摘 要： | 由于ITO具有复杂的微观结构和吸收机制,很难准确测量出它的光学常数.采用变入射角光度椭偏仪(VASE)建立了一套简单的拟合模型,成功拟合出ITO光学常数在可见光范围内随波长的变化关系.并在此基础上分析了电子束蒸发法蒸发速率对ITO薄膜光学常数的影响.根据Hall效应测量了ITO在不同蒸发速率下的载流子浓度,分析了ITO光学常数随蒸发速率增加而增加的机理.
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| 关 键 词： | 椭偏仪 电子束蒸发法 蒸发速率 |
Influence of evaporation rate on optical constants of ITO deposited by e-beam evaporation |
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| LI Tian-lin,ZHU Yan-xu,XU Chen,GAO Guo,SHEN Guang-di.Influence of evaporation rate on optical constants of ITO deposited by e-beam evaporation[J].Journal of Functional Materials,2009,40(1). |
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| Authors: | LI Tian-lin ZHU Yan-xu XU Chen GAO Guo SHEN Guang-di |
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| Affiliation: | Institute of Information;Beijing University of Technology and Beijing Optoelectronic Technology Laboratory;Beijing 100022;China |
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| Abstract: | Due to its complicated microstructure and absorption mechanism,it's difficult to measuring optical constants of ITO.In this paper,variable angle of incidence spectroscopic ellipsometry(VASE) was employed to measure the ellipsometric parameters of ITO.A simple but appropriate model was established to fit experiment data of ITO in visible spectrum.Based on the fitting result of VASE,the influence of evaporation rate on optical constants of ITO deposited by e-beam evaporation was investigated.The result showed... |
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| Keywords: | ITO |
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