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金属薄膜屈服强度的鼓包法表征
引用本文:姚春国,王子菡,龙士国,陈龙,邓方鑫.金属薄膜屈服强度的鼓包法表征[J].材料科学与工程学报,2017,35(4).
作者姓名:姚春国  王子菡  龙士国  陈龙  邓方鑫
作者单位:湘潭大学材料科学与工程学院,特种功能薄膜材料国家地方联合工程实验室,湖南湘潭411105
基金项目:国家自然科学基金资助项目,湖南省科技厅资助项目,湘潭大学科研资助项目
摘    要:本文采用鼓包法研究金属薄膜的屈服强度,对具有圆形自由窗口的镍薄膜一侧施加压力,薄膜受压变形的全场形貌用数字散斑相关法(DSCM)进行测量,并应用板壳理论分析小挠度变形下膜内应力分布情况。结果表明:圆形薄膜受压时首先从边缘开始屈服,从压力-挠度曲线偏离线性关系的临界点得到金属镍膜的屈服强度为467MPa,这和单轴拉伸法测量所得到的屈服强度值吻合较好。

关 键 词:鼓包法  镍薄膜  屈服强度  全场变形  DSCM  小挠度

Determination of Yield Strength of Metal Thin Films by Bulge Test
YAO Chunguo,WANG Zihan,LONG Shiguo,CHEN Long,DENG Fangxin.Determination of Yield Strength of Metal Thin Films by Bulge Test[J].Journal of Materials Science and Engineering,2017,35(4).
Authors:YAO Chunguo  WANG Zihan  LONG Shiguo  CHEN Long  DENG Fangxin
Abstract:In this paper,the bulge test was used to measure the yield strength of nickel thin films.The free-standing thin film was pressured from one side and the out-of-plane deflection was observed by digital speckle correlation method (DSCM).The stress distribution of the film was analyzed by the shell theory under small deflection.The results show that the yielding started from the edge of circle films,and the yield strength of the nickel film is 467MPa.Uniaxial tensile test demonstrates the accuracy and reliability of the method.
Keywords:bulge test  nickel thin film  yield strength  full field deformation  DSCM  small deflection
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