| 静电激振法测量微机械材料的杨氏模量 |
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| 引用本文： | 顾利忠,苏菲,赵颉,张以恒.静电激振法测量微机械材料的杨氏模量[J].材料科学与工程学报,2001,19(2):9-11. |
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| 作者姓名： | 顾利忠 苏菲 赵颉 张以恒 |
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| 作者单位： | 清华大学自动化系, |
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| 基金项目： | 国家自然科学基金，69885005， |
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| 摘 要： | 利用蚀刻硅技术制造的微机械构件 ,由于特殊的制作工艺而需要对其材料的机械性能如杨氏模量等进行测试。这是随微机械技术的产生而提出的一个新课题。文章综述了微机械材料杨氏模量的静态测试法。提出了微机械材料杨氏模量的动态测试法———静电激振法。这种方法具有测试装置简单、测量容易、适应性广等特点
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| 关 键 词： | 微机械材料 杨氏模量 静电激励 |
| 文章编号： | 1004-793(2001)02-0009-03 |
| 修稿时间： | 2000年10月15日 |
The Measurement of Young's Modulus for Micro-machined Materials |
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| GU Li\|zhong,SU Fei,ZHAO Jie,ZHANG Yi\|heng.The Measurement of Young's Modulus for Micro-machined Materials[J].Journal of Materials Science and Engineering,2001,19(2):9-11. |
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| Authors: | GU Li\|zhong SU Fei ZHAO Jie ZHANG Yi\|heng |
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| Abstract: | It is necessary to measure the mechanical properties such as Yong's modulus of micro\|machined materials because of the special manufacturing process by using silicon etching technique. This is a new theme proposed with the appearance of micro\|machined parts. In this paper the static methods for Young's modulus measurement of micro\|machined materials are summarized, After that, electrostatically\|excited method for Young's modulus measurement of micro\|machined materials is proposed. This method has some features such as simplifying the test devices, easy operation and widely being used in practice. |
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| Keywords: | micro\|machined material Young's modulus electrostatically\|excited |
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