平面绝对检测闭环自检实验研究

基于Ai C和Wyant J C的奇偶函数法,提出了4步旋转绝对检测方法,减少了旋转次数,将第二次测量的旋转角度选为90°。实验基于HOOL L9600A-HS3干涉仪,采用4步旋转绝对检测方法,将3个平面两两互检计算出3个平面的绝对面形。其中平面C的表面面形起伏高度均方根(RMS)值和峰谷(PV)值分别为3.460 nm和35.227 nm,经闭环自检后的测量结果分别为3.783 nm和34.305 nm以及3.669 nm和34.252 nm,数据基本一致,表明测量数据能够实现闭环自检。使用该方法对中国计量科学研究院的标准平面镜进行测量, 平面的RMS值和峰谷PV值分别为2.400 nm和19.600 nm,与该院的测量结果2.000 nm和16.000 nm对比,两者的测量偏差在nm量级,充分证明了实验的有效性及高重复性;此外实验还分析了温度对测量结果的影响。

Absolute Test of Optical Planar by Closed Loop

Based on the Ai C and Wyant J C method of odd and even functions, a four-step rotary absolute test method is proposed to reduce the number of rotations and select the rotation angle of the second measurement as 90°. Experiment is based on HOOL L9600A-HS3 interferometer, using four-step rotation absolute measurement method, the three planes test with each other to calculate the absolute surface of the three planes, in which the plane C surface topography height root mean square (RMS) value and peak valley (PV) are 3.460 nm and 35.227 nm. After closed-loop self-test, measurement results are 3.783 nm and 34.305 nm,3.669 nm and 34.252 nm, it indicating that the measurement data can be closed-loop self-test. Using this method, the plane of National Institute of Metrology in China is measured. The RMS value and and the PV value of the plane are 2.400 nm and 19.600 nm, respectively, which are compared with the measurement results of 2.000 nm and 16.000 nm of National Institute of Metrology. The measurement deviation is on the order of nm, the measurement results fully proves the effectiveness of the experiment and high repeatability. In addition, the experiment also analyzes the influence of temperature on the measurement results.