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检测表面粗糙度的光纤传感器研究
引用本文:徐建强,江驰,张惠,夏霄红,刘裕勤.检测表面粗糙度的光纤传感器研究[J].计量学报,2002,23(4):280-282.
作者姓名:徐建强  江驰  张惠  夏霄红  刘裕勤
作者单位:1. 山东大学物理与微电子学院,济南,250061
2. 山东省计量科学研究所,济南,250014
摘    要:论述了测量表面粗糙度的反射散射比光纤传感器的结构、工作原理。介绍了它具有的抗干扰能力强、测量精度高、重复性好、可测微小面积和孔洞底面等异型表面等特点。给出了实测结果 ,并对影响测量的各种因素进行了分析讨论

关 键 词:表面粗糙度  光纤传感器  反射散射比  半导体激光器
文章编号:1000-1158(2002)04-0280-04
修稿时间:2000年6月8日

Study on Fiber Sensor for Measuring Surface Roughness
XU Jian qiang ,JIANG Chi ,ZHANG Hui ,XIA Xiao hong ,LIU Yu qin.Study on Fiber Sensor for Measuring Surface Roughness[J].Acta Metrologica Sinica,2002,23(4):280-282.
Authors:XU Jian qiang  JIANG Chi  ZHANG Hui  XIA Xiao hong  LIU Yu qin
Affiliation:XU Jian qiang 1,JIANG Chi 2,ZHANG Hui 2,XIA Xiao hong 2,LIU Yu qin 1
Abstract:A new fiber sensor for measuring surface roughness using ratio of diffuse and reflections is introduced. It expatiates the structure, working principle and characteristic of the fiber sensor, and the practically measuring result is given. The fiber sensor has strong ability of anti jamming, high survey precision, good replication quality, and can measure exiguity surface and bottom surface of the hole. The factor which affecting the measurement are analyzed and discussed.
Keywords:Surface roughness  Fiber sensor  Ratio of reflect and diffuse  Semiconductor laser
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