原子力显微镜探针原位有效参数对线宽测量的修正

针对原子力显微镜（AFM）的线宽和轮廓的精确测量，对AFM探针的原位有效参数进行了定义和表征，提出使用AFM探针的原位有效参数对AFM的线宽测量结果进行修正的模型。采用有效半径和半内角表征AFM探针的复合形状，悬臂轴倾角表征探针的安装状态，设计了具有不同梯形截面的两个表征样板，通过对表征样板进行AFM和扫描电子显微镜（SEM）的比对测量获得了探针的原位有效参数。提出了在线宽测量中，当AFM的扫描轮廓线具有不同的斜度时分别采用的不同的修正公式。采用此公式和探针的原位参数对掩膜板的AFM线宽测量结果进行了修正。

Amendment of AFM Linewidth Measurement by the Effective Parameters of Tip in Situ

The effective parameters of atomic force microscope (AFM) tip in situ are defined and characterized and the amendment model of AFM linewidth measurement by the effective parameters of tip in situ is offered for the accurate linewidth and profile measurement. The effective radius and the half internal angle are used to characterize the composite shape of AFM tip, and the cantilever axis slope angle is used as the characteristic parameter of the installing status of AFM tip. The effective parameters are obtained through the comparative measurement between AFM and scanning electron microscope (SEM) on two specially designed characterizers with straps having different trapezoidal profiles. The different amendment expressions that can be executed for different slope angles of AFM scanning profiles are offered. The amendment expressions and the effective parameters have been utilized to amend the result of the AFM linewidth measurement on a microelectronic mask.