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中国真空计量发展概述
引用本文:李得天,陈旭,于红燕,张涤新,费渭南,查良镇.中国真空计量发展概述[J].真空与低温,2004,10(1):6-16.
作者姓名:李得天  陈旭  于红燕  张涤新  费渭南  查良镇
作者单位:1. 兰州物理研究所,甘肃,兰州,730000
2. 清华大学,电子工程系,北京,100084
3. 中国计量科学研究院,北京,100013
摘    要:回顾了近50多年来中国真空计量的发展历史.内容包括真空(全压力)测量与校准、分压力测量与校准、气体微流量测量与校准,从中可对中国真空计量的历史渊源和现状有一个完整的了解.

关 键 词:真空计量学  全压力  分压力  气体微流量(漏率)
文章编号:1006-7086(2004)01-0006-11
修稿时间:2003年12月22

DEVELOPMENTS OF VACUUM METROLOGY IN CHINA
LI De-tian,CHEN Xu,YU Hong-yan.DEVELOPMENTS OF VACUUM METROLOGY IN CHINA[J].Vacuum and Cryogenics,2004,10(1):6-16.
Authors:LI De-tian  CHEN Xu  YU Hong-yan
Affiliation:LI De-tian~1,CHEN Xu~2,YU Hong-yan~
Abstract:The developments of vacuum metrology in China during the past 50 years are reviewed. It include vacuum (total pressure) measurement and calibration, partial pressure measurement and calibration, and gas micro-flow measurement and calibration. From which the historical developments and the status of vacuum metrology in China can be found entirely.
Keywords:vacuum metrology  total pressure  partial pressure  gas micro-flow (leak rate)
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