| 比较法真空标准漏孔校准方法研究 |
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| 引用本文： | 赵澜,冯焱,成永军,张涤新,杨长青,李莉,徐婕.比较法真空标准漏孔校准方法研究[J].真空与低温,2013(4):228-232. |
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| 作者姓名： | 赵澜 冯焱 成永军 张涤新 杨长青 李莉 徐婕 |
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| 作者单位： | 兰州空间技术物理研究所国防科技工业真空一级计量站,甘肃兰州730000 |
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| 摘 要： | 比较法校准真空标准漏孔是通过四极质谱计比较气体流量计提供的标准气体流量与被校真空标准漏孔产生的离子流获得校准值。主要介绍了比较法真空标准漏孔的校准方法、装置原理、校准过程及校准结果的处理等，并提出了减小测量不确定度的影响因素。
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| 关 键 词： | 比较法 真空标准漏孔 校准方法 |
SYUDY ON COMPARISON CALIBRATION METHOD OF VACUUM REFERENCE LEAK |
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| ZHAO Lan,FENG Yan,CHENG Yong-jun,ZHANG Di-xin,YANG Chang-qing,LI Li,XU Jie.SYUDY ON COMPARISON CALIBRATION METHOD OF VACUUM REFERENCE LEAK[J].Vacuum and Cryogenics,2013(4):228-232. |
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| Authors: | ZHAO Lan FENG Yan CHENG Yong-jun ZHANG Di-xin YANG Chang-qing LI Li XU Jie |
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| Affiliation: | ( Lanzhou Institute of Physics, Primary Standard Laboratory of Vacuum NDM, Lanzhou 730000, China ) |
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| Abstract: | Comparison calibration method is compared ion currents using quadruple mass spectrometer between standard gas flow by provided gas flowmeter and leak by provided calibrated vacuum reference leak . The leakage is gained. The calibration method, apparatus principle, calibration results are introduced. The influence factor for reducing measurement uncertainty is provided. |
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| Keywords: | comparison method vacuum reference leak calibration method |
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