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基于MEMS技术的自适应光学系统的研究
引用本文:杨振刚,陈海清,李俊,余洪斌.基于MEMS技术的自适应光学系统的研究[J].光电工程,2007,34(2):1-4.
作者姓名:杨振刚  陈海清  李俊  余洪斌
作者单位:华中科技大学,光电子科学与工程学院,湖北,武汉,430074
摘    要:用自适应光学系统来校正由大气湍流等产生的波前畸变,能够得到很好的效果.通过对自适应光学系统的工作原理进行研究,提出了一种基于MEMS技术的微小型自适应光学系统校正波前畸变的方法,将MEMS技术应用于变形反射镜,并构建了具体的实验平台,用来校正一种人为产生的波前畸变,且阐述了具体的实验过程.实验结果表明,基于MEMS技术的自适应光学系统能够很好地闭环校正波前畸变,且其体积小、质量轻、校正性能稳定,为自适应光学技术在星载相机上的应用提供了依据.

关 键 词:自适应光学系统  MEMS技术  波前探测器  变形反射镜  波前校正
文章编号:1003-501X(2007)02-0001-04
收稿时间:2006/3/6
修稿时间:2006-03-06

Adaptive optical system based on MEMS technology
YANG Zhen-gang,CHEN Hai-qing,LI Jun,YU Hong-bin.Adaptive optical system based on MEMS technology[J].Opto-Electronic Engineering,2007,34(2):1-4.
Authors:YANG Zhen-gang  CHEN Hai-qing  LI Jun  YU Hong-bin
Affiliation:Institute of Optoelectronic Science and Engineering, Huazhong University of Science and Technology, Wuhan 430074, China
Abstract:Correction of the wavefront error caused by the turbulence can get better effect with an adaptive optical system.A correction method of the micro-miniature adaptive optical system based on Micro Electromechanical System(MEMS) technology was proposed by analyzing the working theory of the adaptive optical system.An experimental system including deformable mirror based on MEMS technology was designed to correct a factitious wavefront error,and the experimental process was expatiated in detail.The experimental results show that the adaptive optical system can preferably correct the wavefront error through closed loop control,and that its small volume,light weight and steady capability greatly support the application of adaptive optics in space camera.
Keywords:Adaptive optical system  MEMS technology  Wavefront detector  Deformable mirror  Wavefront correction
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