| 高精度干涉仪镜头支撑结构的光机集成分析 |
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| 引用本文： | 张娟,吴永前,伍凡,吴高峰.高精度干涉仪镜头支撑结构的光机集成分析[J].光电工程,2011(10):146-150. |
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| 作者姓名： | 张娟 吴永前 伍凡 吴高峰 |
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| 作者单位： | 中国科学院光电技术研究所; |
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| 摘 要： | 根据高精度干涉仪镜头的工作状况,给出了乎放时镜头的装卡方式.用Ansys Workbench有限元分析软件对镜头由重力、支撑结构所导致的面形变化进行仿真分析,在对光机结构进行有限元分析的基础上,反复优化镜头机械结构设计,从而使支撑结构引起的系统误差降到最低,以zcmike多项式为接口工具拟合镜面变形,评估了该支撑结构对...
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| 关 键 词： | 干涉仪 变形 Zernike多项式 有限元分析 |
Integrated Opto-mechanical Analysis for the Lens of High-precision Interferometer Support Structure |
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| ZHANG Juan,WU Yong-qian,WU Fan,WU Gao-feng.Integrated Opto-mechanical Analysis for the Lens of High-precision Interferometer Support Structure[J].Opto-Electronic Engineering,2011(10):146-150. |
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| Authors: | ZHANG Juan WU Yong-qian WU Fan WU Gao-feng |
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| Affiliation: | ZHANG Juan,WU Yong-qian,WU Fan,WU Gao-feng (Institute of Optics and Electronics,Chinese Academy of Sciences,Chengdu 610209,China) |
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| Abstract: | A horizontal placing method for the lens of high-precision interferometer is given according to its operating mode.Using Ansys Workbench finite element software,simulation and analysis are carried out on the deformation of mirror surface which is caused by gravity and the support structure.Based on the Finite Element Analysis (FEA) for opto-mechanical structure,optimize the mechanical design of the lens repeatedly,so that the systematic errors caused by support structure get to minimization.Fit deformed mir... |
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| Keywords: | interferometer deformation Zernike polynomial FEA |
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