| 衍射微透镜列阵掩模制作软件的设计 |
| |
| 引用本文： | 白临波,邱传凯.衍射微透镜列阵掩模制作软件的设计[J].光电工程,2000,27(5):23-26. |
| |
| 作者姓名： | 白临波 邱传凯 |
| |
| 作者单位： | 中国科学院光电技术研究所微细加工光学技术国家重点实验室,四川,成都,610209 |
| |
| 摘 要： | 研究了衍射微透镜列阵的设计方法及ＣＩＦ格式掩模数据的数据结构与生成方法，设计了一套产用软件，采用图形切割、跟踪计算等方法，解决了生成子孔径为矩形、六 方形及圆环扇形的衍射微透镜列阵掩模的问题，满足了实际系统对衍射微透镜列阵子孔径形状的各种需求。
|
| 关 键 词： | 衍射微透镜列阵 掩模 图形切割 软件开发 |
| 修稿时间： | : |
Design of Mask Manufacturing Software for Diffractive Microlens Arrays |
| |
| BAI Lin-bo,QIU Chuan-kai.Design of Mask Manufacturing Software for Diffractive Microlens Arrays[J].Opto-Electronic Engineering,2000,27(5):23-26. |
| |
| Authors: | BAI Lin-bo QIU Chuan-kai |
| |
| Abstract: | The design method for diffractive microlens arrays,the data struc t ure of CIF format mask data and their generating method are investigated in the paper.A practical software is designed.The problems in generating the masks for d iffractive microlens arrays with sub-aperture shapes of rectangular,hexagon,cir que-sector are solved by adopting the methods of image segmentation and trackin g algorithm,thus the various requirements of the practical systems for the sub- apertures of the diffractive microlens arrays are fulfilled. |
| |
| Keywords: | Diffractive microlens arrays Software design Mask data file Pattern segmentation |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
