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扫描近场光学显微镜的光纤探针
引用本文:刘秀梅,王佳.扫描近场光学显微镜的光纤探针[J].光电工程,1999,26(2):25-29,34.
作者姓名:刘秀梅  王佳
作者单位:清华大学精密计量与测试国家重点实验室
摘    要:扫描近场光学显微镜(SNOM)打破了传统光学显微镜的衍射极限分辨率,自80年代中期出现以来在10多年的时间内获得了迅速的发展,并在很多的领域有很广阔的应用前景。扫描探针的形状及针尖的大小是影响SNOM分辨率的关键因素之一。

关 键 词:显微镜  扫描探针  热拉法  腐蚀法  SMOM

The Development of Optic Fiber Probe for the Scanning Near Field Optical Microscope
LIU Xiu mei,WANG Jia.The Development of Optic Fiber Probe for the Scanning Near Field Optical Microscope[J].Opto-Electronic Engineering,1999,26(2):25-29,34.
Authors:LIU Xiu mei  WANG Jia
Abstract:The scanning near field optical microscope breaks the resolution of the diffraction limit of the conventional optical microscope.Since mid 1980s,it has achieved rapid development in the past over 10 years.It has a broad application prospect in many fields.The shape and size of the scanning probe tip are the key factors in affecting the resolution of the scanning near field optical microscope.A novel hot drawing method for making probe is put forward by using the self designed experimental setup.The successful rate in experiments has been greatly raised by the combination of the hot drawing method and chemical etching method.The optimal sizes of the probe tips obtained with two methods have reached 96nm and 76nm,respectively.
Keywords:Scanning near field optical microscopes  Scanning probe  Hot  drawing method  HF etching method    
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