基于干涉条纹移动量的非接触振动测量研究

为了实现大振幅、高带宽振动的非接触精密测量,本文提出了一种全新的光学测量系统.两束相干光的远场干涉条纹位置与两束光之间相位差有关,相位差的变化将引起干涉条纹移动.获取主条纹的位置,可以计算两束光之间的相位差,基于此可以还原物体的振动位移量.对振幅为10μm的单频余弦信号以及频率为44.1 kHz的声音信号仿真还原结果表明,本文所提光学系统和还原算法可以还原出亚微米级的振动信号,并能准确还原出音频信息.

Non-contact Vibration Measurement Based on the Movement of Interference Fringes

In order to get the precise measurement results of large-amplitude high-bandwidth non-contact vibration, a new optical model and an algorithm for vibration measurement are put forward. Far-field interference fringe position is related with the phase of two beams of coherent light. The phase difference can be obtained through the position of maximum intensity fringe, which expresses the vibration displacement. Simulation results of cosine signal with the amplitude 10 μm and sound signals with the frequency 44.1 kHz expresses that sub micron vibration and sound vibration can be obtained.