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微机械薄膜变形镜的闭环校正模型
引用本文:李邦明,廖文和,沈建新,梁春.微机械薄膜变形镜的闭环校正模型[J].光电工程,2009,36(9).
作者姓名:李邦明  廖文和  沈建新  梁春
作者单位:南京航空航天大学机电学院,南京,210016
基金项目:国家863计划资助项目 
摘    要:介绍了微机械薄膜变形镜(MMDM)面形影响函数的意义,并测量了Oko公司37通道MMDM的面形影响函数矩阵,实验验证了镜面形变和单个驱动电极电压平方之间的线性关系,分析了变形镜的校正能力,建立了自适应光学系统闭环校正的模型.搭建基于MMDM的自适应光学实验系统,采用人眼出射波前作为原始波前进行实验,结果表明,模型能快速有效的对动态畸变波前进行校正,为基于MMDM的自适应光学系统提供了算法支持.

关 键 词:自适应光学  微机械薄膜变形镜  面形影响函数  校正能力  校正模型

Closed-loop Correction Model Based on Micromachine Membrane Deformable Mirror
LI Bang-ming,LIAO Wen-he,SHEN Jian-xin,LIANG Chun.Closed-loop Correction Model Based on Micromachine Membrane Deformable Mirror[J].Opto-Electronic Engineering,2009,36(9).
Authors:LI Bang-ming  LIAO Wen-he  SHEN Jian-xin  LIANG Chun
Affiliation:LI Bang-ming,LIAO Wen-he,SHEN Jian-xin,LIANG Chun ( College of Mechanical & Electrical Engineering,Nanjing University of Aeronautics and Astronautics,Nanjing 210016,China )
Abstract:The meaning of Micromachine Membrane Deformable Mirror (MMDM) figure influence function is discussed, and the figure influence function matrix of oko company 37-channel MMDM is measured. The linear relationship between the deformation of mirror surface and single actuator voltages square is experimentally verified. MMDM correction capability is analyzed and a closed-loop correction model of adaptive optical system is established. An adaptive optical experimental system based on MMDM is built. Moreover, wave...
Keywords:adaptive optics  micromachine membrane deformable mirror  figure influence function  correction capability  correction model  
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