| 相关共路干涉技术测量表面轮廓的研究 |
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| 引用本文： | 屠大维,卓永模.相关共路干涉技术测量表面轮廓的研究[J].光电工程,1994,21(3):43-48. |
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| 作者姓名： | 屠大维 卓永模 |
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| 作者单位： | 上海工业大学机械自动化学院，浙江大学光电与科学仪器工程系 |
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| 摘 要： | 提出一种集共路干涉与相关处理为一体的非接触表面轮廓仪。这种新的结构体系克服了同类仪器中环境干扰、导轨误差及光源噪声影响，适合于高精度表面轮廓测试。仪器测量精度优于４ｎｍ。
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| 关 键 词： | 轮廓测量 相关干涉术 表面光洁度 轮廓仪 |
A Study of Correlative Common-Path Interferometer for measuring Surface Profiles |
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| Tu Dawei.A Study of Correlative Common-Path Interferometer for measuring Surface Profiles[J].Opto-Electronic Engineering,1994,21(3):43-48. |
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| Authors: | Tu Dawei |
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| Abstract: | A non-contact surface profilometer with common-path interference and correlative processing is proposed. The instrument has the advantages of non environmental interence, no guides error and light sourcenoise. lt is applicable to high accuracy surface profile measuring. The accuracy of the profilometer is less than 4 nm. |
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| Keywords: | Profile measurement Correlation interferometry Coaxial optical systems Correlation Processing precision measurement Profilometers |
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