一种共路补偿激光漂移的直线度测量方法

在激光基准长距离、高精度直线度测量中,空气扰动是影响其测量精度的一个主要因素。提出了一种简单的共路补偿空气扰动造成激光漂移的方法。角锥棱镜作为位置敏感器,四象限探测器探测角锥棱镜逆向反射光所携带的直线度误差,二维PSD和透镜用来监测空气扰动所带来的角度漂移。实验结果表明,通过补偿后,空气扰动所带来附加位置误差可以减少大约75%。

Measuring straightness method with common path compensation for laser drift

Atmosphere turbulence is the major factor that affects the accuracy of the propagating direction of a laser beam, and causes serious errors in laser straightness measurement at long distance. A simple method of suppression of laser drift caused by air turbulence is put forward in the paper. With corner retro-reflector as position detector, the linearity error caused by reflection light of the corner retro-reflector is detected by a quadrant detector. 2-D position-sensitive detector and a lens are used to monitor angular drift caused by air turbulence. Experimental results show that the additional position error induced by air turbulence can be reduced by about 75%. Two-dimensional errors caused by air turbulence can be compensated simultaneously through common path.