Effect of thermal annealing on the optical properties and residual stress of graded-index-like films deposited by radio-frequency ion-beam sputtering |
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Authors: | Tang Chien-Jen Jaing Cheng-Chung Lee Kun-Hsien Lee Cheng-Chung |
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Affiliation: | Department of Optoelectronic System Engineering, Minghsin University of Science and Technology, Hsin-Chu, Taiwan. cjtang@must.edu.tw |
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Abstract: | Composite films of Ta-Si oxide and graded-index-like films have been realized by using radio-frequency ion-beam sputtering. The influence of thermal annealing on the optical properties and residual stress of single-layer composite films and graded-index-like films has been studied. The residual stress and optical properties of both types of films were more stable than that of the notch filters fabricated from a series of discrete quarter-wave layers made by alternatively stacking high and low index materials after annealing. |
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