| 微电子机械系统进展和趋势 |
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| 引用本文： | 王渭源,鲍敏杭.微电子机械系统进展和趋势[J].功能材料与器件学报,1996,2(3):129-136. |
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| 作者姓名： | 王渭源 鲍敏杭 |
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| 作者单位： | [1]中国科学院上海冶金研究所传感技术国家重点实验室 [2]复旦大学电子工程系 |
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| 基金项目： | 国家科委攀登计划B项目,国家自然科学基金,机械部项目,上海市科委项目,中国科学院重要项目 |
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| 摘 要： | 本文对微电子机械系统的进展和趋势提出了一些观点性意见，在阐述了微机械技术和ＭＥＭＳ的特点后，强调发展ＭＥＭＳ器件要利用其特点而避免其短处，并为此列举了五个方面成功的ＭＥＭＳ器件。最后，本文讨论了了ＭＥＭＳ进一步发展的趋势和提出了我国发展ＭＥＭＳ的意见。
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| 关 键 词： | 微电子机械系统 微机械 MEMS器件 |
DEVELOPMENT AND PROSPECT OF MICRO ELECTRO MECHANICAL SYSTEMS |
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| Wei Yuan WANG.DEVELOPMENT AND PROSPECT OF MICRO ELECTRO MECHANICAL SYSTEMS[J].Journal of Functional Materials and Devices,1996,2(3):129-136. |
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| Authors: | Wei Yuan WANG |
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| Abstract: | The ideas about the development and prospect of Micro Electro Mechanical Systems( MEMS)have been advanced. After considering the peculiaries of micromachining technology and MEMS, the needs for successful development of MEMS have been suggested on the basis of utilizing its peculiaries and avoiding its weakness. Five kinds of MEMS devices to meet the above mentioned suggestion have been described. The international future trends and domestic development of MEMS are discussed. |
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| Keywords: | Micro Electro Mechanical Systems (MEMS) micromachining technology MEMS devices |
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