| 非晶金刚石薄膜的制备及其性能研究 |
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| 引用本文： | 赵建平,王曦.非晶金刚石薄膜的制备及其性能研究[J].功能材料与器件学报,1997,3(1):67-71. |
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| 作者姓名： | 赵建平 王曦 |
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| 作者单位： | 中国科学院上海冶金研究所离子束开放研究实验室 |
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| 摘 要： | 本文利用一种新的等离子体沉积技术－真空磁过滤弧沉积制备得到一种无氢的非晶碳膜。ＥＥＬＳ分析表明，这种非晶碳膜几乎不含有ｓ０＾２和ｓｐ杂化键，呈现出高度的金刚石特征，以致可以被称为非晶金刚石膜。
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| 关 键 词： | FAD 非晶金刚石 薄膜 弧源沉积 |
PREPARATION OF AMORPHOUS DIAMOND FILMS AND STUDY ON THEIR PROPERTIES |
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| ZHAO Jianping,WANG Xi,CHEN Zhiying,YANG Shiqi,LIU Xianghuai,SHI Tiansheng.PREPARATION OF AMORPHOUS DIAMOND FILMS AND STUDY ON THEIR PROPERTIES[J].Journal of Functional Materials and Devices,1997,3(1):67-71. |
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| Authors: | ZHAO Jianping WANG Xi CHEN Zhiying YANG Shiqi LIU Xianghuai SHI Tiansheng |
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| Abstract: | Nonhydrogenated amorphous carbon films have been prepared by a new plasma technique, filtered arc deposition (FAD) It was found that the carbon were highly sp 3 bonded so that the films were referred to as amorphous diamond (a D) UV, IR and elliposometry spectra were applied to investigate the optical properties of the formed films The mechanical properties and structure characteristics of FAD a D films were studied in detail In addition, the field emission behavior of the films were also investigated in this work |
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| Keywords: | Filtered arc deposition (FAD) amorphous diamond (a D) structure properties |
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