|
|||||
|
|
Correction to: Co-sputtering of Al1?xScxN thin films on Pt(111): a characterization by Raman and IR spectroscopies |
|
| Authors: | Solonenko Dmytro Lan Chuanqi Schmidt Constance Stoeckel Chris Hiller Karla Zahn Dietrich R T |
| Affiliation: | 1.Semiconductor Physics, Chemnitz University of Technology, 09107, Chemnitz, Germany ;2.Center for Microtechnologies, Chemnitz University of Technology, 09126, Chemnitz, Germany ;3.Fraunhofer Institute for Electronic Nano Systems ENAS, 09126, Chemnitz, Germany ; |
| Abstract: | Journal of Materials Science - |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |