| 一种钽靶材织构评价方法的模型构建 |
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| 引用本文： | 汪凯,钟景明,李兆博,焦红忠,宿康宁,王莉,马小文.一种钽靶材织构评价方法的模型构建[J].材料开发与应用,2017,32(4). |
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| 作者姓名： | 汪凯 钟景明 李兆博 焦红忠 宿康宁 王莉 马小文 |
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| 作者单位： | 1. 稀有金属特种材料国家重点实验室,宁夏石嘴山753000;中色(宁夏)东方集团有限公司,宁夏石嘴山753000;2. 中色(宁夏)东方集团有限公司,宁夏石嘴山,753000 |
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| 基金项目： | 国家02重大科技专项《300 mm硅片工艺用溅射靶材研发与产业化》 |
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| 摘 要： | 研究了一种钽靶材织构评价方法模型,关注{100}、{110}、{111}三种面织构的组份含量和分布均匀性,并对三种织构进行了定义,规定晶界角度定义为≤2°,组份含量取与标准织构取向差小于15°的晶粒的百分含量;同时,对取样方法与测试方法进行了规定,依据本模型,可通过织构分布折线图、15°取向图和IPF图来对钽靶材单点与整靶织构分布情况进行综合评价。
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| 关 键 词： | 钽靶材 织构评价 方法构建 |
Model Establishing of an Evaluation Method for Tantalum Target Texture |
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| WANG Kai,ZHONG Jingming,LI Zhaobo,JIAO Hongzhong,SU Kangning,WANG Li,MA Xiaowen.Model Establishing of an Evaluation Method for Tantalum Target Texture[J].Development and Application of Materials,2017,32(4). |
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| Authors: | WANG Kai ZHONG Jingming LI Zhaobo JIAO Hongzhong SU Kangning WANG Li MA Xiaowen |
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| Abstract: | The model of an evaluation method for tantalum target texture was establisheds,and component contents and distribution uniformity of {100},{110} and {111} textures were investigated,and the grain boundary angle was decided to be no more than 2°.Texture contents were the percent of grains with the standard texture orientation deviation less than 15°.Meanwhile,sampling method and testing method were regulated.According to the model,single-point texture distribution and multipoint texture distribution could be evaluated by statistical chart,15°orientation graph and IPF coloring map. |
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| Keywords: | tantalum target texture evaluation method establishment |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
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