| 液相沉积法制备类金刚石膜的研究 |
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| 引用本文： | 王红卫,孙敏,沈风雷,闻荻江.液相沉积法制备类金刚石膜的研究[J].材料开发与应用,2005,20(5):17-20. |
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| 作者姓名： | 王红卫 孙敏 沈风雷 闻荻江 |
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| 作者单位： | 苏州大学,材料工程学院,江苏,苏州,215021;苏州科技学院,江苏,苏州,215011 |
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| 基金项目： | 江苏省高校自然科学基金 |
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| 摘 要： | 探讨了用液相法在钛合金表面沉积制备类金刚石膜的可能性,研究了沉积膜工艺条件对膜的影响,得出了适宜的沉积条件。结果表明,通过液相法可以沉积制备得到DLC膜,但与沉积条件有着密切的关系。当电压为1600~1850V、温度为60~62℃、电极间距为8~10mm、沉积时间大于36h时,才能在钛合金表面得到完整的DLC绝缘膜。
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| 关 键 词： | 液相沉积 钛合金 类金刚石 |
| 文章编号： | 1003-1545(2005)05-0017-04 |
| 收稿时间： | 2005-03-22 |
| 修稿时间： | 2005年3月22日 |
Study on Diamond-like Carbon Film Prepared by Liquid-deposition |
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| WANG Hong-wei,SUN Min,SHEN Feng-lei,WEN Ding-jiang.Study on Diamond-like Carbon Film Prepared by Liquid-deposition[J].Development and Application of Materials,2005,20(5):17-20. |
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| Authors: | WANG Hong-wei SUN Min SHEN Feng-lei WEN Ding-jiang |
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| Affiliation: | 1. Material Engineering School of Suzhou University, Suzhou 215021, China; 2. Suzhou College of Science and Technology, Suzhou 215011, China |
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| Abstract: | A new method to prepare diamond-like carbon film on Ti alloy surface by liquid-deposition is introduced.The influence of parameters on the films is discussed and the proper parameters are determined.The results show that DLC can be deposited on Ti alloy by the method of liquid-deposition and the deposition condition has a strong impact on the deposited DLC film.Only when the voltage is 1600～1850V,the temperature is 60～62℃,the distance between electrodes is 8～10mm and the deposition time is more than 36 hours,an insulating DLC film can form on the Ti alloy surface. |
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| Keywords: | Liquid-deposition Ti alloy Diamond-like carbon |
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